ES32B/36B

The 4 P.P. discs are independently controlled, allowing for simultaneous four-axis machining or individual P.P. disc machining.

The 4 P.P. discs are driven by variable-frequency motors, and their rotational speeds are adjustable.

The 4 P.P. discs can be operated separately on both sides or centrally via the touchscreen.

Each of the 4 P.P. plates has an independent pressure stabilization system

The 4 P.P. plates support “fast descent, slow descent, slow ascent, and fast ascent”

P.P. plate contact pressure is controllable, ensuring processing of wafers that cannot withstand high pressure

Single-head P.P. pressure up to 300 kg (expandable); pressure can be monitored and adjusted via the touchscreen

Custom-made low-friction pneumatic cylinders (not standard commercial cylinders); robust cylinder shafts prevent wobbling

The chuck is equipped with an automatic water-cooling mechanism to prevent overheating of the workpiece and chuck. Constant-temperature chilled water circulation maintains a stable chuck temperature, which can be monitored via an infrared temperature sensor on the touchscreen.

32B 2300 kg

36B 2600 kg

380V/50Hz

0–80 RPM

0.4 kW × 4 P.P. drive motors

7.5 kW lower platen drive motor

0–90 RPM

300 kg

32B

2” discs: Single P.P. 20 discs, 4P.P. 80 discs

4” discs: Single P.P. 5 discs, 4P.P. 20 discs

36B

2” discs: Single P.P. 25 discs, 4P.P. 100 discs

4” discs: Single P.P. 7 discs, 4P.P. 28 discs

6” discs: Single P.P. 3 discs, 4P.P. 12 discs

0.6 MPa

0.8 kg

15 ~ 35 °C

Humidity: Below 85%, no condensation

Air Quality: Free of corrosive, flammable, or harmful gases; free of pollutants, dust, etc.